Title :
All-polymer photonic devices using excimer laser micromachining
Author :
Jiang, J. ; Callender, C.L. ; Noad, J.P. ; Walker, R.B. ; Mihailov, S.J. ; Ding, J. ; Day, M.
Author_Institution :
Commun. Res. Centre, Ottawa, Ont., Canada
Abstract :
A method for preparing endfaces of polymer waveguides on plastic substrates using excimer laser radiation is presented. Using a focussed excimer laser beam at 193 nm, clean vertical cuts have been achieved through plastic substrate, polymer waveguide core, and upper cladding material. This technique allows efficient coupling of light from an optical fiber into all-polymer photonic devices and facilitates dicing and optical fiber alignment groove fabrication.
Keywords :
excimer lasers; integrated optics; laser beam machining; laser materials processing; micromachining; optical fabrication; optical fibres; optical polymers; optical waveguides; 193 nm; all-polymer photonic devices; endfaces preparation; excimer laser micromachining; excimer laser radiation; focused excimer laser beam; light coupling; optical fibre; optical fibre alignment groove fabrication; plastic substrates; polymer waveguide core; polymer waveguides; upper cladding material; Fiber lasers; Laser beam cutting; Laser beams; Micromachining; Optical fibers; Optical materials; Optical waveguides; Plastics; Polymers; Waveguide lasers;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2003.823124
