Title :
A piezo-mesh-diode pressure transducer
Author :
Toussaint, H.-N.
fDate :
7/1/1967 12:00:00 AM
Abstract :
A new semiconductor pressure transducer is presented which shows a higher sensitivity than commonly used devices. A new diode avoids the problem of extremely accurate stylus positioning.
Keywords :
Electrical resistance measurement; Equations; Etching; Force measurement; Mechanical variables measurement; P-n junctions; Semiconductor diodes; Temperature; Transducers; Voltage;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1967.5813
