Title :
Fabrication and evaluation of LiNbO/sub 3/ periodic waveguide with etched grooves
Author :
Enokihara, A. ; Suzuki, A. ; Adachi, J. ; Iwamoto, T. ; Murata, H. ; Okamura, Y.
Author_Institution :
Adv. Technol. Res. Labs., Matsushita Electr. Ind. Co. Ltd., Tokyo
Abstract :
A new periodic waveguide structure with grooves etched on the surface of a proton-exchanged LiNbO3 ridge is demonstrated. The grooves were fabricated by ICP dry etching. A steep stop band of 3.2 nm width at 1.545 mum was obtained by the 355 mum-long periodic waveguide. Induced optical group delay was estimated at 4.6 ps per 1 mm waveguide length.
Keywords :
ion exchange; lithium compounds; optical fabrication; optical waveguides; ridge waveguides; ICP dry etching; LiNbO3; etched grooves; optical group delay; periodic waveguide; proton-exchanged ridge; size 3.2 nm; size 355 mum; waveguide length;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20070320
