• DocumentCode
    891743
  • Title

    Fabrication and evaluation of LiNbO/sub 3/ periodic waveguide with etched grooves

  • Author

    Enokihara, A. ; Suzuki, A. ; Adachi, J. ; Iwamoto, T. ; Murata, H. ; Okamura, Y.

  • Author_Institution
    Adv. Technol. Res. Labs., Matsushita Electr. Ind. Co. Ltd., Tokyo
  • Volume
    43
  • Issue
    11
  • fYear
    2007
  • Firstpage
    629
  • Lastpage
    630
  • Abstract
    A new periodic waveguide structure with grooves etched on the surface of a proton-exchanged LiNbO3 ridge is demonstrated. The grooves were fabricated by ICP dry etching. A steep stop band of 3.2 nm width at 1.545 mum was obtained by the 355 mum-long periodic waveguide. Induced optical group delay was estimated at 4.6 ps per 1 mm waveguide length.
  • Keywords
    ion exchange; lithium compounds; optical fabrication; optical waveguides; ridge waveguides; ICP dry etching; LiNbO3; etched grooves; optical group delay; periodic waveguide; proton-exchanged ridge; size 3.2 nm; size 355 mum; waveguide length;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20070320
  • Filename
    4216361
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=891743