Title :
Ion microbeam radiation system
Author :
Heidel, D.F. ; Bapst, U.H. ; Jenkins, K.A. ; Geppert, L.M. ; Zabel, T.H.
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
fDate :
4/1/1993 12:00:00 AM
Abstract :
An ion microbeam radiation test system has been built for studying radiation-induced charge collection and single event upsets in advanced semiconductor circuits. With this system, it is possible to direct an ion beam of a diameter as small as 1 μm onto a circuit or test structure with a placement accuracy of 1 μm. The components of the system and its operation are described. Applications are described which demonstrate the capabilities of the system
Keywords :
automatic test equipment; integrated circuit testing; ion beam applications; ion beam effects; 1 micron; ion microbeam radiation test system; radiation-induced charge collection; semiconductor circuits; single event upsets; Alpha particles; Circuit testing; Energy measurement; Ion beams; Particle measurements; Predictive models; Semiconductor device measurement; Single event upset; System testing; Very large scale integration;
Journal_Title :
Nuclear Science, IEEE Transactions on
