Title :
Efficient sputtering in a cold-cathode discharge in magnetron geometry
Author :
Wasa, Kiyotaka ; Hayakawa, S.
Abstract :
Efficient sputtering has been achieved in a cold-cathode discharge in a magnetron geometry under a strong magnetic field. The sputtering may be readily used for the production of thin-film microcircuits. The mechanism of the sputtering is discussed in connection with the mode of discharge.
Keywords :
Cathodes; Effective mass; Electrons; Geometry; Germanium; Magnetic anisotropy; Magnetic fields; Perpendicular magnetic anisotropy; Sputtering; Surface discharges;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1967.6113
