DocumentCode :
894488
Title :
Thermal-stability improvement of a sulfur-passivated InGaP/InGaAs/GaAs HFET
Author :
Lai, Po-Hsien ; Fu, Ssu-I ; Tsai, Yan-Ying ; Yen, Chih-Hung ; Chuang, Hung-Ming ; Cheng, Shiou-Ying ; Liu, Wen-Chau
Author_Institution :
Dept. of Electr. Eng., Nat. Cheng-Kung Univ., Tainan, Taiwan
Volume :
6
Issue :
1
fYear :
2006
fDate :
3/1/2006 12:00:00 AM
Firstpage :
52
Lastpage :
59
Abstract :
The temperature-dependent characteristics of an InGaP/InGaAs/GaAs heterostructure field-effect transistor (HFET), using the (NH4)2Sx solution to form the InGaP surface passivation, are studied and demonstrated. The sulfur-passivated device shows significantly improved dc and RF performances over a wide temperature range (300-510 K). With a 1×100-μm2 gate-dimension HFET by (NH4)2Sx treatment, the considerably improved thermal stability over dc performances including lower temperature variation coefficients on the turn-on voltage (-1.23 mV/K), the gate-drain breakdown voltage (-0.05 mV/K), the gate leakage current (1.04 μA/mm·K), the threshold voltage (-1.139 mV/K), and the drain-saturation-current operating regimes (-3.11×10-4/K) are obtained as the temperature is increased from 300 to 510 K. In addition, for RF characteristics, the sulfur-passivated device also shows a low degradation rate on drain-saturation-current operating regimes (-3.29×10-4/K) as the temperature is increased from 300 to 400 K. These advantages provide the promise for high-speed high-frequency high-temperature electronics applications.
Keywords :
III-V semiconductors; gallium arsenide; high electron mobility transistors; high-temperature electronics; indium compounds; semiconductor device reliability; thermal stability; (NH4)2S; (NH4)2Sx solution; 300 to 510 K; InGaP-InGaAs-GaAs; InGaP-InGaAs-GaAs HFET; heterostructure field-effect transistors; high-frequency electronics; high-speed electronics; high-temperature electronics; sulfur treatment; sulfur-passivated; surface passivation; temperature-dependent characteristics; thermal-stability improvement; Breakdown voltage; Gallium arsenide; HEMTs; Indium gallium arsenide; MODFETs; Passivation; Radio frequency; Temperature distribution; Thermal stability; Threshold voltage; Heterostructure field-effect transistor (HFET); sulfur treatment; temperature-dependent characteristics;
fLanguage :
English
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
Publisher :
ieee
ISSN :
1530-4388
Type :
jour
DOI :
10.1109/TDMR.2006.870348
Filename :
1618655
Link To Document :
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