Title :
Magnetic induction machines integrated into bulk-micromachined silicon
Author :
Arnold, David P. ; Das, Sauparna ; Cros, Florent ; Zana, Iulica ; Allen, Mark G. ; Lang, Jeffrey H.
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA, USA
fDate :
4/1/2006 12:00:00 AM
Abstract :
This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni80Fe20, Co65Fe18Ni17) within bulk-micromachined and fusion-bonded silicon to form the machine structures. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 μN·m.
Keywords :
induction motors; magnetic devices; micromotors; rotors; bulk-micromachined silicon; electroplated materials; fusion-bonded silicon; machine structures; magnetic induction machines; silicon-based microengine power generation systems; tethered rotors; Batteries; Engines; Fabrication; Induction machines; Iron; Laboratories; Magnetic materials; Power generation; Rotors; Silicon; AC generators; MEMS; induction machines; magnetic materials; micromachining;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2006.873951
