Title :
Energy Losses and Mean Free Paths of Electrons in Silicon Dioxide
Author :
Ashley, J.C. ; Anderson, V.E.
Author_Institution :
Health and Safety Research Division Oak Ridge National Laboratory Oak Ridge, Tennessee 37380
Abstract :
Theoretical models and calculations are combined with experimental optical data to determine a model energy-loss function for SiO2. Sum-rule checks and comparisons with experimental information are made to insure overall consistency of the model. The model energy-loss function is employed to calculate electron inelastic mean free paths and stopping powers for electrons with energies ¿ 10 keV in SiO2.
Keywords :
Electron optics; Electronics industry; Energy exchange; Energy loss; Health and safety; Laboratories; Monte Carlo methods; Optical losses; Silicon compounds; Solid state circuits;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1981.4335688
