Title :
Toroidal inductors for radio-frequency integrated circuits
Author :
Liu, Wai Y. ; Suryanarayanan, Jayanthi ; Nath, Jayesh ; Mohammadi, Saeed ; Katehi, Linda P B ; Steer, Michael B.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
Toroidal inductors achieve low loss by constraining magnetic flux to a well-defined path and away from ground planes and semiconducting substrates. This paper presents a micromachined implementation of the toroidal inductor, with focus primarily on microwave integrated circuits on a low-resistivity silicon wafer achieving a Q of 22 and a self-resonant frequency greater than 10 GHz. A verified analytic model is developed.
Keywords :
MMIC; Q-factor; inductors; integrated circuit modelling; losses; micromachining; resonance; MMIC; Q factor; RFIC; Si; ground planes; low loss toroidal inductor; low-resistivity silicon wafer; magnetic flux path; micromachined implementation; microwave integrated circuits; monolithic microwave integrated circuit; radio-frequency integrated circuits; self-resonant frequency; semiconducting substrates; toroidal inductors; verified analytic model; Frequency; Inductors; Magnetic flux; Magnetic losses; Microwave integrated circuits; Radiofrequency integrated circuits; Semiconductivity; Semiconductor device modeling; Silicon; Substrates;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2003.822019
