Wavenumber domain analysis of two-dimensional SAW images captured by phase-sensitive laser probe system

Author

Hashimoto, Ken-Ya ; Kamizuma, Hiroshi ; Watanabe, Masashi ; Omori, Tatsuya ; Yamaguchi, Masatsune

Author_Institution

Dept. of Electron. & Mech. Eng., Chiba Univ.

Volume

54

Issue

5

fYear

2007

fDate

5/1/2007 12:00:00 AM

Firstpage

1072

Lastpage

1075

Abstract

This paper is aimed at demonstrating how the wavenumber domain analysis of two-dimensional (2-D) images captured by phase-sensitive laser probe systems is applied in the characterization of RF SAW devices. Effectiveness is demonstrated through the selective characterization of spurious resonance modes and scattered, nonguided modes appearing in SAW resonators.

Keywords

image sensors; remote sensing by laser beam; surface acoustic wave devices; surface acoustic waves; nonguided modes; phase-sensitive laser probe system; resonance modes; scattered modes; surface acoustic wave images; surface acoustic wave resonators; two-dimensional images; wavenumber domain analysis; Image analysis; Laser modes; Optical beams; Probes; Radio frequency; Resonance; Surface acoustic wave devices; Surface acoustic waves; Surface emitting lasers; Two dimensional displays; Acoustics; Algorithms; Image Interpretation, Computer-Assisted; Lasers; Refractometry; Sonication; Surface Properties;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2007.353

Filename

4225319