10K Gate I/sup 2/L and 1K Component Analog Compatible Bipolar VLSI Technology - HIT-2

An advanced analog/digital bipolar VLSI technology that combines on the same chip 2-ns 10K I/sup 2/L gates with 1K analog devices is proposed. The new technology, called high-density integration technology-2 (HIT-2), is based on a new structure concept that consists of three major techniques shallow grooved-isolation, I/sup 2/L active layer etching, and I/sup 2/L current gain increase. I/sup 2/L circuits with 80-MHz maximum toggle frequency have developed compatibly with n-p-n transistors having a BV/sub CEO/of more than 10 V and an f/sub T/ of 5 GHz, and lateral p-n-p transistors having an f/sub T/ of 150 MHz.