Title :
A method of evaporating thin films under 100 Å
Author :
Hsieh, E.J. ; Brown, Dean
fDate :
7/1/1968 12:00:00 AM
Abstract :
A new method is described for depositing thin films with prescribed thicknesses of 100 Å or less. The method is based on the use of a geometrical scale factor and is an extension of the conventional weighing method.
Keywords :
Calibration; Monitoring; Optical interferometry; Resonant frequency; Solids; Substrates; Temperature measurement; Temperature sensors; Thickness measurement; Transistors;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1968.6547
