DocumentCode
898600
Title
A method of evaporating thin films under 100 Å
Author
Hsieh, E.J. ; Brown, Dean
Volume
56
Issue
7
fYear
1968
fDate
7/1/1968 12:00:00 AM
Firstpage
1243
Lastpage
1245
Abstract
A new method is described for depositing thin films with prescribed thicknesses of 100 Å or less. The method is based on the use of a geometrical scale factor and is an extension of the conventional weighing method.
Keywords
Calibration; Monitoring; Optical interferometry; Resonant frequency; Solids; Substrates; Temperature measurement; Temperature sensors; Thickness measurement; Transistors;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1968.6547
Filename
1448477
Link To Document