Title :
A MEMS-Based Ionization Gas Sensor Using Carbon Nanotubes
Author :
Hou, Zhongyu ; Wu, Jiahao ; Zhou, Weimin ; Wei, Xing ; Xu, Dong ; Zhang, Yafang ; Cai, Bingchu
Author_Institution :
Nat. Key Lab. of Micro/Nano Fabrication Technol., Shanghai Jiao Tong Univ.
fDate :
6/1/2007 12:00:00 AM
Abstract :
We demonstrate here the successful operation of an ionization gas sensor with a gap spacing S of 2 or 7plusmn0.4 mum and using carbon nanotubes as the electrode material. The device is chip based and fabricated using a microelectromechanical system process. Application of a bias of 0.6-1.8 V (Sap2 mum) or 12-15 V (Sap7 mum) to the electrodes generates an electric field that is sufficient to field ionize He, CO2, and their mixtures in air with high sensitivity and selectivity. The approach is considered as effective for lowering the operation voltage of ionization gas sensors below 36 V (safety voltage criterion) and is significant for the development of the smart device in this field
Keywords :
carbon nanotubes; electrodes; gas sensors; ionisation; micromachining; microsensors; 0.6 to 1.8 V; 12 to 15 V; 7 micron; MEMS; carbon nanotubes; electrode material; gas discharges; ionization gas sensor; microelectromechanical system process; smart device; Carbon nanotubes; Discharges; Electrodes; Fabrication; Gas detectors; Helium; Ionization; Laboratories; Low voltage; Microelectromechanical systems; Carbon nanotubes (CNTs); gas discharges; ionization gas sensors; microelectromechanical systems (MEMS);
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2007.896370
