A MEMS-Based Ionization Gas Sensor Using Carbon Nanotubes

Author

Hou, Zhongyu ; Wu, Jiahao ; Zhou, Weimin ; Wei, Xing ; Xu, Dong ; Zhang, Yafang ; Cai, Bingchu

Author_Institution

Nat. Key Lab. of Micro/Nano Fabrication Technol., Shanghai Jiao Tong Univ.

Volume

54

Issue

6

fYear

2007

fDate

6/1/2007 12:00:00 AM

Firstpage

1545

Lastpage

1548

Abstract

We demonstrate here the successful operation of an ionization gas sensor with a gap spacing S of 2 or 7plusmn0.4 mum and using carbon nanotubes as the electrode material. The device is chip based and fabricated using a microelectromechanical system process. Application of a bias of 0.6-1.8 V (Sap2 mum) or 12-15 V (Sap7 mum) to the electrodes generates an electric field that is sufficient to field ionize He, CO₂, and their mixtures in air with high sensitivity and selectivity. The approach is considered as effective for lowering the operation voltage of ionization gas sensors below 36 V (safety voltage criterion) and is significant for the development of the smart device in this field

Keywords

carbon nanotubes; electrodes; gas sensors; ionisation; micromachining; microsensors; 0.6 to 1.8 V; 12 to 15 V; 7 micron; MEMS; carbon nanotubes; electrode material; gas discharges; ionization gas sensor; microelectromechanical system process; smart device; Carbon nanotubes; Discharges; Electrodes; Fabrication; Gas detectors; Helium; Ionization; Laboratories; Low voltage; Microelectromechanical systems; Carbon nanotubes (CNTs); gas discharges; ionization gas sensors; microelectromechanical systems (MEMS);

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2007.896370

Filename

4231351