DocumentCode
899889
Title
MOS transducers with digital measurement capability
Author
Kuo, C.K. ; Scheibner, E.J.
Volume
56
Issue
9
fYear
1968
Firstpage
1599
Lastpage
1600
Abstract
A new MOS type of transducer is reported which can be used to measure mechanical pressure or force, temperature, and light in digital form.
Keywords
Capacitance; Capacitance-voltage characteristics; Force measurement; Frequency; Gallium arsenide; Mechanical variables measurement; Pressure effects; Pressure measurement; Temperature measurement; Transducers;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1968.6662
Filename
1448592
Link To Document