Title :
MOS transducers with digital measurement capability
Author :
Kuo, C.K. ; Scheibner, E.J.
Abstract :
A new MOS type of transducer is reported which can be used to measure mechanical pressure or force, temperature, and light in digital form.
Keywords :
Capacitance; Capacitance-voltage characteristics; Force measurement; Frequency; Gallium arsenide; Mechanical variables measurement; Pressure effects; Pressure measurement; Temperature measurement; Transducers;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1968.6662
