Title :
Depth profiling by phase shift detection in scanning electron-acoustic microscopy
Author :
Marty-Dessus, D. ; Franceschi, J.L.
Author_Institution :
Lab. d´Opt. Electron., CNRS, Toulouse, France
fDate :
5/13/1993 12:00:00 AM
Abstract :
A method of depth profiling in an object is presented. A modulated electron beam produces acoustic waves which are detected by a piezoelectric sensor. An adapted treatment of the transmitted signal enables cuts to be obtained at different depths within the sample.
Keywords :
acoustic imaging; fault location; integrated circuit testing; piezoelectric transducers; scanning electron microscopy; ultrasonic applications; ultrasonic devices; IC testing; acoustic waves; depth profiling; modulated electron beam; phase shift detection; piezoelectric sensor; scanning electron-acoustic microscopy; subsurface defects detection; transmitted signal;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19930563
