• DocumentCode
    901596
  • Title

    Enhanced Radiation Effects on Submicron Narrow-Channel NMOS

  • Author

    Chen, J.Y. ; Henderson, R.C. ; Martin, R. ; Patterson, D.O.

  • Author_Institution
    Hughes Research Laboratories 3011 Malibu Canyon Road Malibu, CA 90265
  • Volume
    29
  • Issue
    6
  • fYear
    1982
  • Firstpage
    1681
  • Lastpage
    1684
  • Abstract
    We have observed an enhanced radiation sensitivity for narrow-channel NMOS transistors. The radiation-induced threshold shift increases rapidly as the channel width decreased below 4 ¿m. For example, with 4.5 ¿m channel lengths the radiation sensitivity for 0.8 ¿m wide FETs is twice that for 5 ¿m wide devices. This geometry dependence can be explained qualitatively by two-dimensional potential calculations. These calculations show the fringing field influence on threshold voltage is reduced after radiation, leading to a larger total shift for the narrow channel devices.
  • Keywords
    Boron; Capacitance; FETs; Geometry; Implants; Laboratories; MOS devices; MOSFETs; Radiation effects; Threshold voltage;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1982.4336428
  • Filename
    4336428