Title :
Ohmic contacts to p-type ZnSe using ZnTe/ZnSe multiquantum wells
Author :
Hiei, F. ; Ikeda, Makoto ; Ozawa, Masayoshi ; Miyajima, Teruyuki ; Ishibashi, A. ; Akimoto, Katsuhiro
Author_Institution :
Sony Corp., Yokohama, Japan
fDate :
5/13/1993 12:00:00 AM
Abstract :
Employing p+-ZnTe/ZnSe quantum wells whose sub-bands are aligned in energy so that resonant tunnelling of holes can occur through the multiquantum well region, Au/Pt/Pd nonalloyed ohmic contacts to p-type ZnSe have been realised. A specific contact resistance as low as 5.0*10-2 Omega cm2 has been achieved for N-doped ZnSe with a hole concentration of 7.0*1016 cm-3.
Keywords :
II-VI semiconductors; contact resistance; gold; interface electron states; ohmic contacts; palladium; platinum; semiconductor quantum wells; semiconductor-metal boundaries; tunnelling; zinc compounds; Au-Pt-Pd-ZnTe-ZnSe; MQW; N-doped ZnSe; contact resistance; hole concentration; multiquantum wells; nonalloyed ohmic contacts; p-type ZnSe; p +-ZnTe/ZnSe quantum wells; resonant tunnelling; semiconductors;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19930586