DocumentCode
901883
Title
Displacement sensor using channelled spectrum dispersed on a linear CCD array
Author
Taplin, S. ; Podoleanu, A.Gh. ; Webb, David J. ; Jackson, D.A.
Author_Institution
Kent Univ., Canterbury, UK
Volume
29
Issue
10
fYear
1993
fDate
5/13/1993 12:00:00 AM
Firstpage
896
Lastpage
897
Abstract
A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5 mm with an accuracy of better than 6 mu m.
Keywords
CCD image sensors; displacement measurement; light interferometers; measurement by laser beam; optical sensors; 1.5 mm; broadband source; channelled spectrum; laser diode source; linear CCD array; low coherence interferometric sensor;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19930598
Filename
216299
Link To Document