• DocumentCode
    901883
  • Title

    Displacement sensor using channelled spectrum dispersed on a linear CCD array

  • Author

    Taplin, S. ; Podoleanu, A.Gh. ; Webb, David J. ; Jackson, D.A.

  • Author_Institution
    Kent Univ., Canterbury, UK
  • Volume
    29
  • Issue
    10
  • fYear
    1993
  • fDate
    5/13/1993 12:00:00 AM
  • Firstpage
    896
  • Lastpage
    897
  • Abstract
    A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5 mm with an accuracy of better than 6 mu m.
  • Keywords
    CCD image sensors; displacement measurement; light interferometers; measurement by laser beam; optical sensors; 1.5 mm; broadband source; channelled spectrum; laser diode source; linear CCD array; low coherence interferometric sensor;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19930598
  • Filename
    216299