Title :
Optimised proton implantation step for vertical-cavity surface-emitting lasers
Author :
Ressel, P. ; Strusny, H. ; Gramlich, S. ; Zeimer, U. ; Sebastian, J. ; Vogel, Klaus
Author_Institution :
Ferdinand Braun Inst. fur Hochstfrequenztech., Berlin, Germany
fDate :
5/13/1993 12:00:00 AM
Abstract :
The influence of proton implantation in the distributed Bragg reflectors of vertical-cavity surface-emitting laser structures has been studied via measurement of the photoluminescence for different implantation and annealing conditions. It is shown that by optimal annealing the isolating layer can be positioned close to the active region with no detectable deterioration of photoluminescence.
Keywords :
annealing; distributed Bragg reflector lasers; ion implantation; laser cavity resonators; photoluminescence; semiconductor lasers; DBR laser; annealing conditions; distributed Bragg reflectors; optimal annealing; photoluminescence; proton implantation step; surface-emitting lasers; vertical-cavity;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19930612
