Control of a 5DOF Magnetically Levitated Positioning Stage

Author

Fulford, Cameron ; Maggiore, Manfredi ; Apkarian, Jacob

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada

Volume

17

Issue

4

fYear

2009

fDate

7/1/2009 12:00:00 AM

Firstpage

844

Lastpage

852

Abstract

A high-precision, magnetically levitated, five degree-of-freedom (5DOF) positioning stage is presented. Four independently controlled iron-cored permanent magnet linear synchronous motors are used to translate the stage and rotate it about the two horizontal axes. Six optical encoders with 10 mum resolution, mounted on linear guides, are used to measure displacements and rotations. A detailed mathematical model is developed and nonlinear tracking controllers are designed for the 5DOF system using feedback linearization, output regulation, and antiwindup compensation for step and sinusoidal references.

Keywords

control system synthesis; displacement measurement; linear synchronous motors; magnetic levitation; motion control; nonlinear control systems; permanent magnet motors; position control; 5DOF magnetically levitated positioning stage; antiwindup compensation; displacement measurement; feedback linearization; iron-cored permanent magnet linear synchronous motors; linear guides; nonlinear tracking controllers; optical encoders; output regulation; rotation measurement; Five degrees-of-freedom (5DOF) motion control; internal model regulation; magnetic levitation; nonlinear control; permanent magnet linear synchronous motor (PMLSM); positioning stage; tracking;

fLanguage

English

Journal_Title

Control Systems Technology, IEEE Transactions on

Publisher

ieee

ISSN

1063-6536

Type

jour

DOI

10.1109/TCST.2008.2002755

Filename

4956978