DocumentCode :
902763
Title :
Frequency analysis of the probe current in an RF discharge
Author :
Sager, Omer
Volume :
57
Issue :
2
fYear :
1969
Firstpage :
227
Lastpage :
228
Abstract :
The harmonics of the probe current under the influence of a capacitively coupled disturbing voltage are discussed. From the ratio of two amplitudes the unknown RF voltage and the necessary correction of the direct current can be determined.
Keywords :
Equations; Plasma density; Plasma properties; Polynomials; Probes; Radio frequency; Stability; Testing; Voltage; Writing;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1969.6931
Filename :
1448861
Link To Document :
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