Nanophotonics Sensor Based on Microcantilever for Chemical Analysis

Author

Xiang, Wenfeng ; Lee, Chengkuo

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore

Volume

15

Issue

5

fYear

2009

Firstpage

1323

Lastpage

1326

Abstract

A Si-based cantilever sensor with photonic crystal (PC) resonator as readout for chemical sensing and analysis has been developed. The resonant wavelength shift of PC resonator is resulted from PC deformation induced by cantilever bending, in which this optical readout scheme facilitates cantilever deflection measurements in liquid. Through numerical simulation, we demonstrate that the detection capability of this micromechanical sensor operated in water is better than that of sensor operated in air. The minimum detectable Z-displacement and strain of Si/SiO₂ cantilever sensor are derived as 0.6 mum and 0.0098% in water and 0.812 mum and 0.0144% in air, respectively. This novel micromechanical sensor shows its promising future in applications such as detection of proteins and DNA in solution.

Keywords

cantilevers; chemical sensors; micro-optomechanical devices; micromechanical resonators; microsensors; nanophotonics; nanosensors; numerical analysis; photonic crystals; DNA; PC deformation; Z-displacement; cantilever bending; cantilever deflection measurements; cantilever sensor; chemical sensing; microcantilever analysis; micromechanical sensor; nanophotonics sensor; optical readout scheme; photonic crystal resonator; protein detection; resonant wavelength shift; strain detection; MEMS; NEMS; microcantilever; nanomechanical sensor; photonic crystal resonator;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2009.2016578

Filename

4957056