Title :
Resistivity of Thin Metal Films (Short Papers)
Author :
Chaurasia, H.K. ; Voss, W.A.G.
fDate :
1/1/1973 12:00:00 AM
Abstract :
It is shown that the sheet resistance, and hence the resistivity, of very thin metal films (<100 å) can be determined conveniently and accurately by microwave measurements. Accuracy is limited by VSWR measurement, film-holder design, and short-circuit quality. DC and microwave resistivity measurements are given for gold films on cleaved mica.
Keywords :
Circuits; Conductive films; Conductivity measurement; Electrical resistance measurement; Gold; Impedance measurement; Microwave measurements; Rectangular waveguides; Semiconductor films; Substrates;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.1973.1127915
