DocumentCode :
906819
Title :
The feasibility of a heterode pressure transducer
Author :
Moore, R. Max
Volume :
57
Issue :
8
fYear :
1969
Firstpage :
1433
Lastpage :
1434
Abstract :
Several simple pressure transducers have been built by using heterode strain sensors evaporated directly onto a pressure diaphragm. The performance of these units indicates that pressure transducers are a feasible area of application for the heterode strain sensor, and that such transducers are potentially inexpensive and easily adapted to a variety of pressure ranges.
Keywords :
Capacitive sensors; Electromechanical sensors; Fabrication; Hysteresis; Mechanical sensors; Semiconductor diodes; Sensor phenomena and characterization; Silicon; Substrates; Transducers;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1969.7289
Filename :
1449219
Link To Document :
بازگشت