• DocumentCode
    907462
  • Title

    Computer assisted mask production

  • Author

    Rosenfeld, Robert L.

  • Author_Institution
    Applied Logic Corporation, Princeton, NJ
  • Volume
    57
  • Issue
    9
  • fYear
    1969
  • Firstpage
    1629
  • Lastpage
    1634
  • Abstract
    In order to facilitate the utilization of precision computer-controlled equipment to make mask patterns, a user-oriented pattern description language has been devised. The language, designated PREP, for Programmed Electronics Patterns, has statements for programming the elements of mask patterns. Out of these can be constructed libraries of subroutines describing integrated circuit components. Additional PREP statements can be used to build up the total pattern of a set of masks from the subroutines. The PREP language is translated by a computer into a pattern.
  • Keywords
    Algorithms; Automatic generation control; Electronic components; Helium; Integrated circuit manufacture; Large scale integration; Libraries; Man machine systems; Production; Time sharing computer systems;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1969.7347
  • Filename
    1449277