Title :
Computer assisted mask production
Author :
Rosenfeld, Robert L.
Author_Institution :
Applied Logic Corporation, Princeton, NJ
Abstract :
In order to facilitate the utilization of precision computer-controlled equipment to make mask patterns, a user-oriented pattern description language has been devised. The language, designated PREP, for Programmed Electronics Patterns, has statements for programming the elements of mask patterns. Out of these can be constructed libraries of subroutines describing integrated circuit components. Additional PREP statements can be used to build up the total pattern of a set of masks from the subroutines. The PREP language is translated by a computer into a pattern.
Keywords :
Algorithms; Automatic generation control; Electronic components; Helium; Integrated circuit manufacture; Large scale integration; Libraries; Man machine systems; Production; Time sharing computer systems;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1969.7347
