Title :
Recent datareviews from EMIS. Diffusion coefficient of oxygen in silicon, temperature dependence
fDate :
8/1/1985 12:00:00 AM
Keywords :
diffusion in solids; elemental semiconductors; silicon; O diffusion; O diffusivity; Si; absolute temperature; diffusion coefficient; semiconductor; temperature dependence;
Journal_Title :
Solid-State and Electron Devices, IEE Proceedings I
DOI :
10.1049/ip-i-1.1985.0044
