Low Energy X-Ray Spectra Measured with a Mercuric Iodide Energy Dispersive Spectrometer in a Scanning Electron Microscope

A mercuric iodide energy dispersive x-ray spectrometer, with Peltier cooling provided for the detector and input field effect transistor, has been developed and tested in a scanning electron microscope. X-ray spectra were obtained with the 15 keV electron beam. An energy resolution of 225 eV (FWHM) for Mn-K¿ at 5.9 keV and 195 eV (FWHM) for Mg-K line at 1.25 keV has been measured. Overall system noise level was 175 eV (FWHM). The detector system characterization with a carbon target demonstrated good energy sensitivity at low energies and lack of significant spectral artifacts at higher energies.