Microring resonators vertically coupled to buried heterostructure bus waveguides

Author

Choi, S.J. ; Djordjev, K. ; Sang Jun Choi ; Dapkus, P.D. ; Lin, W. ; Griffel, G. ; Menna, R. ; Connolly, J.

Author_Institution

Dept. of Electr. Eng.-Electrophys., Univ. of Southern California, Los Angeles, CA, USA

Volume

16

Issue

3

fYear

2004

fDate

3/1/2004 12:00:00 AM

Firstpage

828

Lastpage

830

Abstract

The authors demonstrate all epitaxial semiconductor microring resonators vertically coupled to buried heterostructure (BH) bus waveguides for the first time. Planar vertically stacked waveguides are successfully grown on BH mesas by conducting a two-step regrowth process. This approach is potentially important for any buried waveguide technology where subsequent surface planarity is required. The measured transmission spectra show resonance dips (1.55/spl sim/1.60) μm with quality factors, extinction ratios, and free spectral ranges of 2500-3.5 dB, and /spl sim/11 nm, respectively, for 10-μm-radii microrings.

Keywords

III-V semiconductors; Q-factor; gallium arsenide; indium compounds; infrared spectra; light transmission; micro-optics; optical planar waveguides; optical resonators; semiconductor devices; semiconductor epitaxial layers; 10 mum; InP-InGaAsP-InP; buried waveguides; epitaxial semiconductor resonators; extinction ratios; free spectral ranges; heterostructure bus waveguides; microring resonators; planar vertically staked waveguides; quality factors; resonance dips; surface planarity; two-step regrowth process; vertical coupling; Extinction ratio; Microcavities; Optical planar waveguides; Optical resonators; Optical waveguides; Planar waveguides; Q factor; Resonance; Semiconductor waveguides; Wafer bonding;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2004.823704

Filename

1269809