DocumentCode
910903
Title
Variation of the admittance of a plasma capacitor with the amplitude of the measuring potential
Author
Freeston, I.L.
Author_Institution
University of Sheffield, Department of Electronic & Electrical Engineering, Sheffield, UK
Volume
6
Issue
21
fYear
1970
Firstpage
672
Lastpage
673
Abstract
The measured admittance is unaffected up to a measuring r.f. potential of r.m.s. value five times the equivalent electron temperature, except in a frequency range in which the admittance is affected by a potential exceeding half the electron temperature. This range is also that of the resonance probe, but it is concluded that any connection between the two effects is indirect.
Keywords
admittance measurement; electric variables measurement; plasma diagnostics; admittance dependence on amplitude of measuring potential; admittance measurements; plane grid capacitor; plasma diagnostics;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19700466
Filename
4234970
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