Title :
Variation of the admittance of a plasma capacitor with the amplitude of the measuring potential
Author_Institution :
University of Sheffield, Department of Electronic & Electrical Engineering, Sheffield, UK
Abstract :
The measured admittance is unaffected up to a measuring r.f. potential of r.m.s. value five times the equivalent electron temperature, except in a frequency range in which the admittance is affected by a potential exceeding half the electron temperature. This range is also that of the resonance probe, but it is concluded that any connection between the two effects is indirect.
Keywords :
admittance measurement; electric variables measurement; plasma diagnostics; admittance dependence on amplitude of measuring potential; admittance measurements; plane grid capacitor; plasma diagnostics;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19700466
