Title :
Enhancement of Surface-Acoustic-Wave Piezoelectric Coupling in Three-Layer Substrates (Short Papebs)
Author :
Venema, A. ; Dekkers, J.J.M.
fDate :
9/1/1975 12:00:00 AM
Abstract :
Numerical results with respect to the piezoelectric coupling of a three-layer substrate (CdS-SiO2-Si) are presented. <111> -cut Si is used, and the direction of propagation is [11
Keywords :
Acoustic devices; Acoustic transducers; Difference equations; Electromagnetic waveguides; Piezoelectric films; Piezoelectric transducers; Silicon; Substrates; Waveguide components; Zinc oxide;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.1975.1128672