DocumentCode :
911450
Title :
Delay Correction for Accurate Extraction of Time Exponent and Activation Energy of NBTI
Author :
Ielmini, Daniele ; Gattel, Francesco
Author_Institution :
Dipt. di Elettron. e Inf., Politec. di Milano, Milan
Volume :
30
Issue :
6
fYear :
2009
fDate :
6/1/2009 12:00:00 AM
Firstpage :
684
Lastpage :
686
Abstract :
Negative-bias temperature instability (NBTI) represents one of the most severe reliability issues for pMOS transistors in logic and analog applications. Accurate reliability predictions require physically based models for NBTI and accurate methods for the estimation of time and temperature kinetic parameters, namely, the power-law time exponent and the activation energy. Describing on-the-fly degradation data by power-law time dependence and Arrhenius thermal activation, we present here a new methodology for estimating the power-law exponent and the activation energy. This allows for physics-based compact models and reliability extrapolations of NBTI.
Keywords :
MOSFET; extrapolation; semiconductor device models; semiconductor device reliability; Arrhenius thermal activation; activation energy; analog application; delay correction; logic application; negative-bias temperature instability; pMOS transistor; physics-based compact model; power-law exponent estimation; power-law time dependence; power-law time exponent; reliability extrapolation; temperature kinetic parameter; Delay effects; Extrapolation; Kinetic theory; Logic; MOSFETs; Niobium compounds; Predictive models; Temperature; Thermal degradation; Titanium compounds; CMOS reliability; Charge trapping; gate-dielectric reliability; negative-bias temperature instability (NBTI); reliability estimation; reliability modeling;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/LED.2009.2020308
Filename :
4968009
Link To Document :
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