A 3D finite element analysis coupled to the impedance boundary condition for the magnetodynamic problem in radiofrequency plasma devices

Author

Louai, F.-Z. ; Benzerga, D. ; Féliachi, M. ; Bouillault, F.

Author_Institution

LRTI, CRTT, Saint-Nazaire, France

Volume

32

Issue

3

fYear

1996

fDate

5/1/1996 12:00:00 AM

Firstpage

812

Lastpage

815

Abstract

In the metallic cooling system (cold crucible) of the radiofrequency (RF) plasma devices, the penetration of flux is limited by the skin effect. So, when analyzing the electromagnetic phenomena that appear in these devices, such metallic parts may be excluded from the region of solution by using the impedance boundary condition (IBC). In this paper the coupling of the IBC to 3D finite element method, when using the magnetic vector potential A and the electric scalar potential V, is described. This model has been applied to an RF plasma device study and validated by comparing the computed results with experimental data

Keywords

electric impedance; finite element analysis; magnetic flux; plasma devices; plasma magnetohydrodynamics; skin effect; 3D finite element analysis; 3D finite element method; cold crucible; electric scalar potential; electromagnetic phenomena; flux penetration; impedance boundary condition; magnetic vector potential; magnetodynamic problem; metallic cooling system; radiofrequency plasma devices; skin effect; Boundary conditions; Cooling; Electromagnetic analysis; Electromagnetic devices; Finite element methods; Impedance; Magnetic analysis; Plasma devices; Radio frequency; Skin effect;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.497365

Filename

497365