• DocumentCode
    912860
  • Title

    Monte Carlo Simulation and Analysis of Elastic and Inelastic Scattering of Electrons in Insulators

  • Author

    Woolf, S. ; Bradford, J.N.

  • Author_Institution
    Arcon Corporation 260 Bear Hill Road Waltham, MA 02154
  • Volume
    34
  • Issue
    6
  • fYear
    1987
  • Firstpage
    1392
  • Lastpage
    1395
  • Abstract
    An electron transport Monte Carlo program, using single scatter cross sections and the latest phonon scattering theory, has been developed to obtain electron and hole distributions in insulators subjected to electron bombardment.
  • Keywords
    Algorithm design and analysis; Charge carrier processes; Electron beams; History; Insulation; Monte Carlo methods; Particle scattering; Phonons; Silicon compounds; Solid state circuits;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1987.4337486
  • Filename
    4337486