DocumentCode
914079
Title
Sputtered ZnO surface-wave transducers
Author
Evans, D.R. ; Lewis, M.F. ; Patterson, E.
Author_Institution
General Electric Co., Central Research Laboratories, Hirst Research Centre, Wembley, UK
Volume
7
Issue
18
fYear
1971
Firstpage
557
Lastpage
558
Abstract
Surface waves have been excited efficiently on fused silica using sputtered ZnO films in conjunction with various transducer arrangements. The results are very promising and have yielded values of K2 up to 0.76%.
Keywords
acoustic transducers; sputtering; surface phenomena; thin film devices; transducers; zinc compounds; 35 MHz; ZnO; piezoelectric materials; piezoelectric transducers; sonic transducers; surface acoustic wave devices; surface phenomena; surface wave propagation; thin films;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19710376
Filename
4235276
Link To Document