Analysis of Temperature Compensation in a Plate Thickness Mode Bulk Acoustic Wave Resonator

Author

Xue, Huan ; Hu, Yuantai ; Wang, Qing-Ming ; Yang, Jiashi

Author_Institution

Huazhong Univ. of Sci. & Technol., Wuhan

Volume

54

Issue

9

fYear

2007

fDate

9/1/2007 12:00:00 AM

Firstpage

1826

Lastpage

1833

Abstract

We analyze temperature-induced frequency shift in a thickness mode bulk acoustic wave resonator with a layer of another material for temperature compensation. The perturbation integral by Tiersten is used to calculate frequency shifts in the resonator under a temperature change. It is shown that, with a proper design of the compensation layer, temperature sensitivity of the resonator can be reduced or made zero.

Keywords

acoustic resonators; bulk acoustic wave devices; perturbation techniques; bulk acoustic wave resonator; perturbation integral; plate thickness mode; temperature compensation; temperature-induced frequency shift; Acoustic materials; Acoustic waves; Capacitive sensors; Integral equations; Resonance; Resonant frequency; Stability; Stress; Temperature sensors; Vibrations; Acoustics; Artifacts; Computer Simulation; Computer-Aided Design; Equipment Design; Equipment Failure Analysis; Models, Theoretical; Reproducibility of Results; Sensitivity and Specificity; Temperature; Transducers;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2007.466

Filename

4337742