Title :
Modeling and numerical study of the electroacoustic behavior in integrated piezoelectric structures under external mechanical stress
Author :
Lematre, Mickaël ; Tran-Huu-Hue, Louis-Pascal ; Feuillard, Guy
Author_Institution :
LUSSI-Equipe CUP, Univ. Francois Rabelais, Blois
fDate :
5/1/2009 12:00:00 AM
Abstract :
The purpose of this study is to model and understand the role of an applied mechanical stress in piezoelectric materials as far as electroacoustic parameters are concerned. In the field of thick or thin film technology, understanding and predicting the behavior of integrated structures when submitted to external or internal mechanical stress is of primary importance. Thus, we propose a modified KLM electroacoustic model of transducer that enables to take into account the effect of a mechanical pre-stress. Then, a numerical study of the electroacoustic parameters for lithium niobate piezoelectric material (coupling coefficient, velocities, associated polarizations, and electrical input impedance) is conducted with regard to the azimuthal and elevation angles, as well as initial pre-stress values. Finally, we study the pulse-echo response of a complete piezoelectric transducer consisting of a piezoelectric film laid down upon a backing material and matching layers, with and without an initial stress, to highlight some benefits of a prestress load.
Keywords :
acoustoelectric effects; acoustoelectric transducers; dielectric polarisation; electric impedance; lithium compounds; piezoelectric thin films; piezoelectric transducers; stress effects; KLM electroacoustic model; LiNbO3; azimuthal angles; coupling coefficient; electrical input impedance; electroacoustic behavior; elevation angles; external mechanical stress; integrated piezoelectric structures; lithium niobate piezoelectric material; piezoelectric film; piezoelectric transducer; polarizations; pulse-echo response; thick film technology; thin film technology; Conducting materials; Impedance; Lithium niobate; Numerical models; Piezoelectric films; Piezoelectric materials; Piezoelectric polarization; Piezoelectric transducers; Pulsed electroacoustic methods; Stress;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFc.2009.1142