A Low-Power Pressure- and Temperature-Programmable Micro Gas Chromatography Column

Author

Potkay, Joseph A. ; Lambertus, Gordon Randall ; Sacks, Richard D. ; Wise, Kensall D.

Author_Institution

Louis Stokes Cleveland VA Med. Center, Cleveland

Volume

16

Issue

5

fYear

2007

Firstpage

1071

Lastpage

1079

Abstract

This paper presents the theory, fabrication, and experimental results for a high-performance low-power micro gas chromatography column. The suspended-dielectric 1-m-long column is split into two sections, permitting independent pressure and temperature programming. Integrated column heaters have a mean resistance of 16.8 kOmega and a temperature coefficient of resistance of 431 ppm/degC. The suspended column requires 11 mW to raise its temperature by 100degC in vacuum (1 mtorr). The column separates ten volatile organic compounds in 52 s and four chemical warfare agent simulants and an explosive simulant in 60 s.

Keywords

chromatography; dielectric heating; micromachining; microsensors; transducers; chemical transducer; gas detector; high-performance low-power micro gas chromatography column; integrated column heaters; mean resistance; micromachining; power 11 mW; resistance 16.8 kohm; size 1 m; suspended-dielectric column; temperature coefficient of resistance; temperature programming; Biomedical engineering; Chemical industry; Fabrication; Gas chromatography; Immune system; Laboratories; Monitoring; Resistance heating; Temperature sensors; Volatile organic compounds; Chemical transducers; column; gas chromatography (GC); gas detectors; low power; micromachining;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2007.902470

Filename

4337804