Title :
ESD: a pervasive reliability concern for IC technologies
Author :
Duvvury, Charvaka ; Amerasekera, Ajith
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
fDate :
5/1/1993 12:00:00 AM
Abstract :
Several aspects of ESD are described from the point of view of the test, design, product, and reliability engineering. A review of the ESD phenomena along with the test methods, the appropriate on-chip protection techniques, and the impact of process technology advances from CMOS to BiCMOS on the ESD sensitivity of IC protection circuits are presented. The status of understanding in the field of ESD failure physics and the current approaches for modeling are discussed
Keywords :
BiCMOS integrated circuits; CMOS integrated circuits; MOS integrated circuits; circuit reliability; electrostatic discharge; failure analysis; integrated circuit technology; integrated circuit testing; protection; reviews; semiconductor device models; BiCMOS; CMOS; ESD failure physics; ESD sensitivity; IC protection circuits; IC technologies; modeling; monolithic IC; on-chip protection; process technology; reliability engineering; review; test methods; Appropriate technology; BiCMOS integrated circuits; CMOS process; CMOS technology; Circuit testing; Electrostatic discharge; Integrated circuit testing; Product design; Protection; Reliability engineering;
Journal_Title :
Proceedings of the IEEE
