Surface roughness determination using spectral correlations of scattered intensities and an artificial neural network technique

An artificial neural network (ANN) technique is applied to the determination of the RMS height and the correlation distance of one-dimensional rough surfaces. The surface is illuminated by a beam wave, and the intensity correlations of the scattered wave at two wavelengths in the specular and backward directions are used to determine the roughness parameters. Scattered intensity correlations calculated by Monte Carlo simulations are used to train the ANN, and two methods, the explicit inversion method and the iterative constrained inversion method, are used to perform the inversion. The inversion values are compared with the target values, and the iterative constrained method is shown to give smaller errors, but it requires longer computer CPU time