Parallel Detection of Si-Based Microcantilevers Resonant Frequencies Using Piezoresistive Signals Downmixing Scheme

Author

Mathieu, Fabrice ; Saya, Daisuke ; Bergaud, Christian ; Nicu, Liviu

Author_Institution

Lab. for Anal. & Archit. of Syst., Nat. Center of Sci. Res., Toulouse

Volume

7

Issue

2

fYear

2007

Firstpage

172

Lastpage

178

Abstract

Piezoresistive microcantilevers were developed to be used as displacement or force sensors associated with self-detection onboard electronic systems. The aim of this work was to realize a parallel integrated and compact detection system without the need for an optical readout scheme. The electronics developed specifically for this application, when dynamically operated, allows us to measure each piezoresistive microcantilever resonance frequency (by achieving at the same time an enhancement of the quality factor) with an accuracy of 0.1 Hz

Keywords

Q-factor; cantilevers; displacement measurement; force sensors; frequency measurement; microsensors; piezoresistive devices; silicon; 0.1 Hz; Si; Si-based microcantilevers; compact detection system; displacement sensors; force sensors; parallel detection; parallel integrated system; piezoresistive microcantilevers; piezoresistive signals downmixing scheme; quality factor; resonance frequency; self-detection onboard electronic systems; Biosensors; Boron; Etching; Fabrication; Force sensors; Frequency measurement; Piezoresistance; Q factor; Resonant frequency; Time measurement; Dynamic measurements; onboard electronics; piezoresistive cantilevers;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2006.886872

Filename

4049784