DocumentCode :
916682
Title :
Sputtering through offset mask for disk acceleration standards
Author :
Peterson, David L.
Author_Institution :
Storage Technol. Corp., Louisville, CO, USA
Volume :
29
Issue :
4
fYear :
1993
fDate :
7/1/1993 12:00:00 AM
Firstpage :
2156
Lastpage :
2159
Abstract :
Magnetic data storage hard-disk media and substrate manufacturers are generally required to perform axial acceleration testing. A method has been devised to produce standard patterns on disks to audit and control such testing. The key concept is to sputter metal through a mask-hole which is adequately offset from the media to produce a smooth (triply differentiable) pattern with a bell-shaped peak and with frequency content nearly bounded by the acceleration filter cutoff frequency for mechanical testing. Computer modeling of and sputtering indicates that this shape may be obtained when the mask aperture diameter is about twice the sputter width of the sputtered profile and with offset altitude slightly larger than the desired sputter value
Keywords :
hard discs; life testing; sputtering; acceleration filter cutoff frequency; axial acceleration testing; computer modeling; hard-disk media; magnetic data storage; mask aperture; mask-hole; mechanical testing; sputtering; Acceleration; Cutoff frequency; Filters; Life estimation; Manufacturing; Memory; Performance evaluation; Shape; Sputtering; Testing;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/20.221039
Filename :
221039
Link To Document :
بازگشت