DocumentCode
916682
Title
Sputtering through offset mask for disk acceleration standards
Author
Peterson, David L.
Author_Institution
Storage Technol. Corp., Louisville, CO, USA
Volume
29
Issue
4
fYear
1993
fDate
7/1/1993 12:00:00 AM
Firstpage
2156
Lastpage
2159
Abstract
Magnetic data storage hard-disk media and substrate manufacturers are generally required to perform axial acceleration testing. A method has been devised to produce standard patterns on disks to audit and control such testing. The key concept is to sputter metal through a mask-hole which is adequately offset from the media to produce a smooth (triply differentiable) pattern with a bell-shaped peak and with frequency content nearly bounded by the acceleration filter cutoff frequency for mechanical testing. Computer modeling of and sputtering indicates that this shape may be obtained when the mask aperture diameter is about twice the sputter width of the sputtered profile and with offset altitude slightly larger than the desired sputter value
Keywords
hard discs; life testing; sputtering; acceleration filter cutoff frequency; axial acceleration testing; computer modeling; hard-disk media; magnetic data storage; mask aperture; mask-hole; mechanical testing; sputtering; Acceleration; Cutoff frequency; Filters; Life estimation; Manufacturing; Memory; Performance evaluation; Shape; Sputtering; Testing;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.221039
Filename
221039
Link To Document