Title :
Electric fields at and near the surface of p-n junctions with negative bevel angles
Author_Institution :
Brown Boveri Research Center, Baden, Switzerland
Abstract :
A new investigation of the field distribution at and near the surface of p-n junctions with negative bevel angles has shown that an absolute field maximum exists 20¿40 ¿m below the surface. This field maximum is reduced with smaller bevel angles, but is stronger for structures with a higher breakdown voltage in the bulk.
Keywords :
electric fields; p-n junctions; breakdown voltage; field distribution; negative bevel angles; pn junctions;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19720123
