Title :
Static Capacitance Calculations for a Surface Acoustic Wave Interdigital Transducer in Multilayered Media
Author :
Venema, Adrian ; Dekkers, Jozef J M ; Humphryes, R.F.
fDate :
4/1/1978 12:00:00 AM
Abstract :
The static capacitance of an interdigital structure in multi-Iayered media has been calculated. Numerical results are given for a surface acoustic wave interdigital transducer on an oxidized silicon substrate with a piezoelectric overlay. The capacitance is derived in terms of the layer thicknesses for zero and infinite substrate resistivity.
Keywords :
Acoustic devices; Acoustic diffraction; Acoustic propagation; Acoustic transducers; Acoustic waves; Capacitance; Filters; Silicon; Surface acoustic wave devices; Surface acoustic waves;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.1978.1129367
