Title :
Gravity-Assisted Seeding Control for 1-D Material Growth
Author :
Chen, C.C. ; Hsu, Lun-Hao ; Rern, Kai ; Cheng, Y.T. ; Hsieh, Yi-Fan ; Wu, Pu-Wei
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
fDate :
7/1/2009 12:00:00 AM
Abstract :
This letter presents a seeding control scheme by utilizing gravity force to form an agglomeration of molten Co seeds on a patterned inverted silicon nanopyramid. Nanometer sized molten Co seeds formed on a nonwettable inverted pyramid surface can roll along the inclination followed by aggregation to form a singular seed with the size depending on the pyramid size and the thickness of as-deposited Co film inside the pyramid. The proposed scheme allowing the formation of well-aligned catalytic seeds with manipulated size will promise the control growth of 1-D material for practical integrated microelectronic device fabrication.
Keywords :
cobalt; gravity; nanofabrication; nanopatterning; silicon; 1D material growth; Co; Si; agglomeration; gravity assisted seeding control; gravity force; integrated microelectronic device fabrication; patterned inverted silicon nanopyramid; seeding control scheme; 1-D material; 3D-IC; gravity-assisted; integrated nanoelectronic circuit; seeding control;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2009.2023320