Title :
Optical and electrical H2- and NO2-sensing properties of Au/InxOyNz films
Author :
Ando, Masanori ; Steffes, Harald ; Chabicovsky, Rupert ; Haruta, Masatake ; Stangl, Guenther
Author_Institution :
Photonics Res. Inst., Japanese Nat. Inst. of Adv. Ind. Sci. & Technol., Ikeda, Japan
fDate :
4/1/2004 12:00:00 AM
Abstract :
In this paper, we describe the optical and electrical gas-sensing properties of InxOyNz films with an ultrathin gold promoter overlayer. We have fabricated InxOyNz films with a nanocrystalline porous structure by RF-sputtering in Ar/N2 followed by an annealing process. Gold particles with 20-30-nm diameter have been formed on top of the InxOyNz films by dc sputtering and an annealing process. We have investigated the optical H2and NO2-sensing properties (change of absorbance) and also the electrical sensing effect (change of electrical resistance) for these two gases. A combined optical/electrical sensor for H2/NO2 is proposed.
Keywords :
crystallisation; gas sensors; gold compounds; indium compounds; nitrogen compounds; optical sensors; oxygen compounds; Au-InxOyNz; H2; NO2; RF-sputtering; annealing; dc sputtering; electrical gas property; electrical resistance; films; gold particles; nanocrystalline porous structure; optical gas sensing; optical-electrical sensor; ultrathin gold promoter; Annealing; Argon; Gases; Gold; Materials science and technology; Nanostructures; Optical films; Optical sensors; Scanning electron microscopy; Sputtering;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2004.823656
