Title :
Microwave measurement of surface conductivity and permittivity of thin layers in an E010 resonator
Author_Institution :
AEG-Telefunken, Forschungsinstitut, Ulm, West Germany
Abstract :
A simple microwave method for measuring the surface conductivity and permittivity of thin layers, such as epitaxial semiconductors on semi-insulating substrates, is proposed, and is shown to be of high accuracy at X band frequencies.
Keywords :
cavity resonators; electrical conductivity measurement; microwave measurement; permittivity measurement; semiconductor thin films; cavity resonator; conductivity measurement; microwave measurement; permittivity measurement; semiconductor thin film;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19720350
