Title :
Manufacture and testing of prototype microturbine module
Author :
Leonard, M. ; Dhariwal, R.S.
Author_Institution :
Microsyst. Eng. Centre, Heriot-Watt Univ., Edinburgh, UK
fDate :
4/13/2006 12:00:00 AM
Abstract :
The practical testing of a prototype microturbine module has shown that the levitation of the rotor that was predicted from previous simulation results does indeed take place and can enhance the performance of the device since contact friction can be considerably reduced. Some preliminary results on the operation of the module are presented.
Keywords :
LIGA; friction; micromechanical devices; rotors; turbines; MEMS; UV-LIGA process; contact friction; microturbine module manufacture; microturbine module testing; rotor levitation;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20060400