DocumentCode
920225
Title
Love wave synchronous resonator on quartz with SiO2 layer
Author
Soluch, W.
Author_Institution
Inst. of Electron. Mater. Technol., Warsaw, Poland
Volume
42
Issue
8
fYear
2006
fDate
4/13/2006 12:00:00 AM
Firstpage
495
Lastpage
497
Abstract
Love wave and surface transverse wave are two independent acoustic modes propagating in the area of periodical electrodes on 35°YX90° cut quartz with a SiO2 layer. A synchronous resonator and the scattering matrix method were used for determination of these waves´ parameters. For the Love wave mode, at a frequency of about 492 MHz, insertion loss, loaded and unloaded quality factors of about 11 dB, 5500 and 7800, respectively, were obtained. This resonator is promising for applications in sensors.
Keywords
Love waves; S-matrix theory; acoustic wave scattering; quartz; silicon compounds; surface acoustic wave resonators; Love wave synchronous resonator; SiO2; scattering matrix method; surface transverse waves; wave parameters;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20064296
Filename
1624769
Link To Document