• DocumentCode
    920225
  • Title

    Love wave synchronous resonator on quartz with SiO2 layer

  • Author

    Soluch, W.

  • Author_Institution
    Inst. of Electron. Mater. Technol., Warsaw, Poland
  • Volume
    42
  • Issue
    8
  • fYear
    2006
  • fDate
    4/13/2006 12:00:00 AM
  • Firstpage
    495
  • Lastpage
    497
  • Abstract
    Love wave and surface transverse wave are two independent acoustic modes propagating in the area of periodical electrodes on 35°YX90° cut quartz with a SiO2 layer. A synchronous resonator and the scattering matrix method were used for determination of these waves´ parameters. For the Love wave mode, at a frequency of about 492 MHz, insertion loss, loaded and unloaded quality factors of about 11 dB, 5500 and 7800, respectively, were obtained. This resonator is promising for applications in sensors.
  • Keywords
    Love waves; S-matrix theory; acoustic wave scattering; quartz; silicon compounds; surface acoustic wave resonators; Love wave synchronous resonator; SiO2; scattering matrix method; surface transverse waves; wave parameters;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20064296
  • Filename
    1624769