Title :
A multispectral image sensor array
Author :
Gerhard, Glen C.
Author_Institution :
Univ. of New Hampshire, Durham, N. H.
Abstract :
A silicon monolithic multispectral photosensor device is described. Fabrication techniques and preliminary spectral response data are presented.
Keywords :
Electrons; Gold; Image sensors; Impurities; Infrared image sensors; Multispectral imaging; Photoconducting devices; Photoconductivity; Sensor arrays; Silicon;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1971.8535
