DocumentCode
920962
Title
Numerical calculation of low-frequency capacitance/voltage curves of m.o.s. capacitors with nonconstant doping profiles
Author
Panigrahi, G.
Author_Institution
University of Illinois, Department of Computer Science, Urbana, USA
Volume
9
Issue
2
fYear
1973
Firstpage
43
Lastpage
44
Abstract
It is demonstrated how a numerical solution of Poisson´s equation can be applied to the calculation of low-frequency capacitance-voltage curves of m.o.s. capacitors with nonconstant doping profiles. Calculation by uniform-doping approximation introduces little error, but it can be avoided, if necessary, by employing the present method.
Keywords
metal-insulator-semiconductor structures; numerical methods; semiconductor doping; MOS capacitors; Poisson´s equations; capacitors; metal insulator semiconductor devices; numerical methods; semiconductor doping;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19730030
Filename
4235965
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