Title :
Numerical calculation of low-frequency capacitance/voltage curves of m.o.s. capacitors with nonconstant doping profiles
Author_Institution :
University of Illinois, Department of Computer Science, Urbana, USA
Abstract :
It is demonstrated how a numerical solution of Poisson´s equation can be applied to the calculation of low-frequency capacitance-voltage curves of m.o.s. capacitors with nonconstant doping profiles. Calculation by uniform-doping approximation introduces little error, but it can be avoided, if necessary, by employing the present method.
Keywords :
metal-insulator-semiconductor structures; numerical methods; semiconductor doping; MOS capacitors; Poisson´s equations; capacitors; metal insulator semiconductor devices; numerical methods; semiconductor doping;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19730030
